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Ultrahigh-Purity Diaphragm Valves (ALD3 and ALD6 Series)

Ultrahigh-Purity Diaphragm Valves (ALD3 and ALD6 Series)

The Swagelok ALD3 and ALD6 series diaphragm valves offer ultrahigh cycle life, high-speed actuation, and flow coefficients up to 0.62, allowing semiconductor manufacturers to achieve the controlled dosing needed for atomic layer deposition (ALD) semiconductor manufacturing.

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  • Fittings - Dielectric Fittings

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  • Hoses and Flexible Tubing - Metal Core Hose